Ellipsometry is a well-known non-destructive optical method for determing film thickness and optical properties. Imaging Ellipsometry combines the power of ellipsometry with microscopy and overcomes the limits of classical ellipsometers.
The Nanofilm Imaging Ellipsometers enable you to study the surface in three steps:
· generating high contrast image from the surface
· ellipsometry with highest lateral resolution (1µm)
· generating of 3D thickness maps






